Comment karlsuss2 SNF 2004-10-20 13:07:53: chuck hissing when wafer in hard contact

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Wed Oct 20 13:07:54 PDT 2004


When I put my wafer into hard contact, there is a hissing noise coming from the chuck/WEC unit. Not loud, but it definitely did not used to be there.  Also, the chuck kind of "cluncks" after exposure as it is moving downward.




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