Shutdown karlsuss2 SNF 2004-09-07 09:05:41: shutdown

martinez at snf.stanford.edu martinez at snf.stanford.edu
Fri Sep 17 15:10:54 PDT 2004


installed wec, set up grab z, cycled resolution wafer. results
are the same as before, good at the top, bad towards the
major flat ~3.5um and below. double checked all fittings,
cleaned mask, maskholder, chuck. cycled two more wafers
with similar results. available for limited use. 




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