From acremann at snf.stanford.edu Mon Aug 1 15:04:27 2005 From: acremann at snf.stanford.edu (acremann at snf.stanford.edu) Date: Mon, 1 Aug 2005 15:04:27 -0700 Subject: Problem karlsuss2 SNF 2005-08-01 15:04:25: loss of vacuum message Message-ID: I get a loss of wafer warning in vacuum contact mode (using the proper chuck and a good, new 4" wafer). From martinez at snf.stanford.edu Tue Aug 2 09:11:20 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 2 Aug 2005 09:11:20 -0700 Subject: Problem karlsuss2 SNF 2005-08-01 15:04:25: loss of vacuum message Message-ID: loaded test mask & wafer. exposed in hard contact program. no vac errors ready for use From me342b at snf.stanford.edu Thu Aug 4 22:41:03 2005 From: me342b at snf.stanford.edu (me342b at snf.stanford.edu) Date: Thu, 4 Aug 2005 22:41:03 -0700 Subject: Problem karlsuss2 SNF 2005-08-04 22:41:02: No image on microscope monitor Message-ID: Cannot see any features of mask on monitor- adjusted range of focus and still didn't see anything. This problem also had by previous user with a different mask. From vilanova at snf.stanford.edu Fri Aug 5 07:16:47 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Aug 2005 07:16:47 -0700 Subject: Problem karlsuss2 SNF 2005-08-04 22:41:02: No image on microscope monitor Message-ID: Users Moved the Focus Knob way far out, I reset everything , Put my mask in Test some wafers , ok to use. From martinez at snf.stanford.edu Mon Aug 29 08:37:52 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 29 Aug 2005 08:37:52 -0700 Subject: Shutdown karlsuss2 SNF 2005-08-29 08:37:50: lamp change Message-ID: From martinez at snf.stanford.edu Mon Aug 29 09:55:36 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 29 Aug 2005 09:55:36 -0700 Subject: Shutdown karlsuss2 SNF 2005-08-29 08:37:50: lamp change Message-ID: lamp change/cal completed