From mahnaz at snf.stanford.edu Wed Jan 19 10:01:25 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 19 Jan 2005 10:01:25 -0800 Subject: Comment karlsuss2 SNF 2005-01-19 10:01:24: I need to cancel all reservation Message-ID: Hi all, KS rep. is here and likes to work on KS2 at 1 pm today. Sorry for the short notice totally out of my control. From cchung at snf.stanford.edu Thu Jan 20 21:19:40 2005 From: cchung at snf.stanford.edu (cchung at snf.stanford.edu) Date: Thu, 20 Jan 2005 21:19:40 -0800 Subject: Problem karlsuss2 SNF 2005-01-20 21:19:39: Intensity Low Message-ID: I had to align and expose my wafers twice. The intensity seems to be low. -Chuck From dwburns at snf.stanford.edu Thu Jan 20 21:21:44 2005 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Thu, 20 Jan 2005 21:21:44 -0800 Subject: Problem karlsuss2 SNF 2005-01-20 21:21:43: Shifted Exposre Times Message-ID: The power meter on SUSS2 is reading 6.7, whereas it previously was set to 15.0. My exposures were lighter and yours may need adjustments also. User beware - whoever adjusted the settings on Channel 1 did not indicate this to anyone I spoke to. From martinez at snf.stanford.edu Fri Jan 21 09:29:36 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 21 Jan 2005 09:29:36 -0800 Subject: Problem karlsuss2 SNF 2005-01-20 21:21:43: Shifted Exposre Times Message-ID: calibrated lamp From martinez at snf.stanford.edu Fri Jan 21 09:29:48 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 21 Jan 2005 09:29:48 -0800 Subject: Problem karlsuss2 SNF 2005-01-20 21:19:39: Intensity Low Message-ID: calibrated lamp From cchung at snf.stanford.edu Sun Jan 23 16:29:54 2005 From: cchung at snf.stanford.edu (cchung at snf.stanford.edu) Date: Sun, 23 Jan 2005 16:29:54 -0800 Subject: Problem karlsuss2 SNF 2005-01-23 16:29:54: Left BSA bottom focus is not smooth Message-ID: The left BSA bottom focus "jumps" around. it's not continuous. And, it's hard to focus as a result. From mahnaz at snf.stanford.edu Mon Jan 24 11:00:35 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 24 Jan 2005 11:00:35 -0800 Subject: Problem karlsuss2 SNF 2005-01-23 16:29:54: Left BSA bottom focus is not smooth Message-ID: I tested the system this morning looks fine, Mostlikely you were looking through the trench on the chuck. From mahnaz at snf.stanford.edu Mon Jan 24 11:00:56 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 24 Jan 2005 11:00:56 -0800 Subject: Comment karlsuss2 SNF 2005-01-19 10:01:24: I need to cancel all reservation Message-ID: done From haniff at snf.stanford.edu Thu Jan 27 11:10:12 2005 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Thu, 27 Jan 2005 11:10:12 -0800 Subject: Problem karlsuss2 SNF 2005-01-27 11:10:12: Poor Profile Message-ID: Exposed 3.0 um spr220 for 2.2 sec. Drawn width of CD=5 um Measure ~2.0 um on top of resist and ~5.0 um on bottom From vilanova at snf.stanford.edu Thu Jan 27 14:40:10 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Jan 2005 14:40:10 -0800 Subject: Problem karlsuss2 SNF 2005-01-27 11:10:12: Poor Profile Message-ID: checked exposure Using same profile , could not repeat the problem , ok to use.