Problem karlsuss2 SNF 2005-01-27 11:10:12: Poor Profile

haniff at snf.stanford.edu haniff at snf.stanford.edu
Thu Jan 27 11:10:12 PST 2005


Exposed  3.0 um spr220 for 2.2 sec.
Drawn width of CD=5 um
Measure ~2.0 um on top of resist and ~5.0 um on bottom




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