From jhpark9 at snf.stanford.edu Wed Jul 6 17:49:35 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Wed, 6 Jul 2005 17:49:35 -0700 Subject: Problem karlsuss2 SNF 2005-07-06 17:49:33: resolution problem Message-ID: low vac and vac contact were checked. Resolution problem is expected because most lines are rupple. Please check it again From vilanova at snf.stanford.edu Thu Jul 7 07:37:45 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Jul 2005 07:37:45 -0700 Subject: Problem karlsuss2 SNF 2005-07-06 17:49:33: resolution problem Message-ID: Recalibrated lamp, exposed wafer, could not repeat the problem, ready to use. From crichter at snf.stanford.edu Sun Jul 17 14:04:23 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sun, 17 Jul 2005 14:04:23 -0700 Subject: Problem karlsuss2 SNF 2005-07-17 14:04:23: No Illumination for the Left Side Optics Message-ID: Can't do backside alignment From vilanova at snf.stanford.edu Mon Jul 18 07:23:13 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 18 Jul 2005 07:23:13 -0700 Subject: Problem karlsuss2 SNF 2005-07-17 14:04:23: No Illumination for the Left Side Optics Message-ID: Replaced Burned Lightbulb , Tested ok , ready to use. From emyers at snf.stanford.edu Mon Jul 18 16:18:57 2005 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 18 Jul 2005 16:18:57 -0700 Subject: Problem karlsuss2 SNF 2005-07-18 16:18:56: Loss of Vac Error Message-ID: Getting a loss of vac error during WEC From calarrudo at snf.stanford.edu Mon Jul 18 16:26:00 2005 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Mon, 18 Jul 2005 16:26:00 -0700 Subject: Problem karlsuss2 SNF 2005-07-18 16:25:59: Loss of vacuum Message-ID: Loss of vacuum at WEC, hit enter vacuum problem still there. From vilanova at snf.stanford.edu Tue Jul 19 07:51:17 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 Jul 2005 07:51:17 -0700 Subject: Problem karlsuss2 SNF 2005-07-18 16:18:56: Loss of Vac Error Message-ID: Initialized Grab Z position , tested ok , ready to use. From vilanova at snf.stanford.edu Tue Jul 19 07:51:34 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 Jul 2005 07:51:34 -0700 Subject: Problem karlsuss2 SNF 2005-07-18 16:25:59: Loss of vacuum Message-ID: Initialized Grab Z position , ready to use. From crichter at snf.stanford.edu Wed Jul 20 18:06:56 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Wed, 20 Jul 2005 18:06:56 -0700 Subject: Problem karlsuss2 SNF 2005-07-20 18:06:56: Loss Of Vacuum Message-ID: Just before exposure, I get a message saying "Loss of vacuum". My exposed & developed wafer was about 200um off From me342b at snf.stanford.edu Wed Jul 20 22:34:48 2005 From: me342b at snf.stanford.edu (me342b at snf.stanford.edu) Date: Wed, 20 Jul 2005 22:34:48 -0700 Subject: Shutdown karlsuss2 SNF 2005-07-20 22:34:47: Loss of Mask Vacuum indicated Message-ID: Loss of Mask Vacuum appears on screen when exposure button pressed. No exposure possible. Vacuum gage (top left) shows higher vacuum than the sharpie marked set point. From vilanova at snf.stanford.edu Thu Jul 21 07:07:47 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 21 Jul 2005 07:07:47 -0700 Subject: Problem karlsuss2 SNF 2005-07-20 18:06:56: Loss Of Vacuum Message-ID: System workinng fine , I exposed a couple of wafers , the problem is the chuck , make sure you clean up the chuck before you use it. Ready to use. From vilanova at snf.stanford.edu Thu Jul 21 07:08:25 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 21 Jul 2005 07:08:25 -0700 Subject: Shutdown karlsuss2 SNF 2005-07-20 22:34:47: Loss of Mask Vacuum indicated Message-ID: COuld not repeat the problem , system working fine, exposed wafers , ready to use. From sanli at snf.stanford.edu Thu Jul 21 10:18:44 2005 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Thu, 21 Jul 2005 10:18:44 -0700 Subject: Shutdown karlsuss2 SNF 2005-07-21 10:18:43: does not expose Message-ID: it says loss of mask vacuum and does not expose From martinez at snf.stanford.edu Thu Jul 21 13:59:41 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 21 Jul 2005 13:59:41 -0700 Subject: Shutdown karlsuss2 SNF 2005-07-21 10:18:43: does not expose Message-ID: cleaned chuck,mask holder, wec adj grab z cycled 5 wafers in hard/cont no vac errors From crichter at snf.stanford.edu Thu Jul 21 19:02:02 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 21 Jul 2005 19:02:02 -0700 Subject: Problem karlsuss2 SNF 2005-07-21 19:02:02: Left Optic on backside has no lighting Message-ID: From vilanova at snf.stanford.edu Fri Jul 22 07:06:45 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Jul 2005 07:06:45 -0700 Subject: Problem karlsuss2 SNF 2005-07-21 19:02:02: Left Optic on backside has no lighting Message-ID: Checked Both lampos LEft and right ( bottom ) and both of them are working, ok to use. From me342e at snf.stanford.edu Fri Jul 22 09:16:49 2005 From: me342e at snf.stanford.edu (me342e at snf.stanford.edu) Date: Fri, 22 Jul 2005 09:16:49 -0700 Subject: Problem karlsuss2 SNF 2005-07-22 09:16:45: mask and wafer vacuum Message-ID: Tool continues to have problems with wafer vacuum loss, and now says it also has mask vacuum loss, although the mask still seems to be held firm. Can still run by hitting 'enter' to get past the errors. From vilanova at snf.stanford.edu Fri Jul 22 09:42:59 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Jul 2005 09:42:59 -0700 Subject: Problem karlsuss2 SNF 2005-07-22 09:16:45: mask and wafer vacuum Message-ID: Operator error, system working fine w, ready to use. From crichter at snf.stanford.edu Fri Jul 22 12:22:50 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 22 Jul 2005 12:22:50 -0700 Subject: Problem karlsuss2 SNF 2005-07-22 12:22:49: Backside misalignment Message-ID: I can line up my alignment marks on the mask to the wafer. Looks ok on the screen, but after developing the alignment is off of about 50 microns. I think it might be because the right side objective can't focus as well as the left one causing the grabbed image to look more fuzzy for the right side objective. Left side is fine. From vilanova at snf.stanford.edu Fri Jul 22 13:54:00 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Jul 2005 13:54:00 -0700 Subject: Problem karlsuss2 SNF 2005-07-22 12:22:49: Backside misalignment Message-ID: Checked left and right backside alignment , both of them Look normal to me , I could not repeat the problem . ready to use. From me342d at snf.stanford.edu Fri Jul 22 15:48:02 2005 From: me342d at snf.stanford.edu (me342d at snf.stanford.edu) Date: Fri, 22 Jul 2005 15:48:02 -0700 Subject: Problem karlsuss2 SNF 2005-07-22 15:48:01: loss of vacuum Message-ID: The machine is reporting 'loss of vacuum' when I load a wafer and when I hit 'enter' to ignore it, I can't expose my wafers. From vilanova at snf.stanford.edu Mon Jul 25 07:16:57 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 25 Jul 2005 07:16:57 -0700 Subject: Problem karlsuss2 SNF 2005-07-22 15:48:01: loss of vacuum Message-ID: Tested System , Exposed a wafer , Could not repeat the problem , I see a lot of people having the same problem because they are not properly centering the wafer on the chuck. ok to use.