Problem karlsuss2 SNF 2005-07-22 09:16:45: mask and wafer vacuum

me342e at me342e at
Fri Jul 22 09:16:49 PDT 2005

Tool continues to have problems with wafer vacuum loss, and now says it also has mask vacuum loss, although the mask still seems to be held firm. Can still run by hitting 'enter' to get past the errors.

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