Problem karlsuss2 SNF 2005-07-22 09:16:45: mask and wafer vacuum

me342e at snf.stanford.edu me342e at snf.stanford.edu
Fri Jul 22 09:16:49 PDT 2005


Tool continues to have problems with wafer vacuum loss, and now says it also has mask vacuum loss, although the mask still seems to be held firm. Can still run by hitting 'enter' to get past the errors.




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