Problem karlsuss2 SNF 2005-07-22 12:22:49: Backside misalignment

crichter at snf.stanford.edu crichter at snf.stanford.edu
Fri Jul 22 12:22:50 PDT 2005


I can line up my alignment marks on the mask to the wafer. Looks ok on the screen, but after developing the alignment is off of about 50 microns. I think it might be because the right side objective can't focus as well as the left one causing the grabbed image to look more fuzzy for the right side objective. Left side is fine.




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