Problem karlsuss2 SNF 2005-07-22 15:48:01: loss of vacuum

me342d at snf.stanford.edu me342d at snf.stanford.edu
Fri Jul 22 15:48:02 PDT 2005


The machine is reporting 'loss of vacuum' when I load a wafer and when I hit 'enter' to ignore it, I can't expose my wafers.




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