Problem karlsuss2 SNF 2005-07-22 15:48:01: loss of vacuum

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Jul 25 07:16:57 PDT 2005


Tested System , Exposed a wafer , Could not repeat 
the problem , I see a lot of people having the same problem 
because they are not properly centering the wafer on the chuck.
ok to use. 




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