From hra at snf.stanford.edu  Fri Jun 17 11:54:43 2005
From: hra at snf.stanford.edu (hra at snf.stanford.edu)
Date: Fri, 17 Jun 2005 11:54:43 -0700
Subject: Problem karlsuss2 SNF 2005-06-17 11:54:42: wafer chuck doesn't go up straight
Message-ID: <mailman.285.1356281959.4015.karlsuss2-pcs@snf.stanford.edu>

causes problems with alignment



From martinez at snf.stanford.edu  Fri Jun 17 15:46:43 2005
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Fri, 17 Jun 2005 15:46:43 -0700
Subject: Problem karlsuss2 SNF 2005-06-17 11:54:42: wafer chuck doesn't go up straight
Message-ID: <mailman.286.1356281959.4015.karlsuss2-pcs@snf.stanford.edu>

initialized system, loaded test mask and wafer
cycled hard contact / 40um process
could not duplicate problem