Problem karlsuss2 SNF 2005-03-28 23:38:06: Loss of vac

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Mar 29 09:37:23 PST 2005


adjusted grab Z  position , cleaned small particles ( wafers
tiny pieces ) from wec using Air gun , exposed wafers ( using
hard contatc , vacuum contact etc) no wafer vacuum errors,
Ok to use. 




More information about the karlsuss2-pcs mailing list