Problem karlsuss2 SNF 2005-03-28 23:38:06: Loss of vac

vilanova at vilanova at
Tue Mar 29 09:37:23 PST 2005

adjusted grab Z  position , cleaned small particles ( wafers
tiny pieces ) from wec using Air gun , exposed wafers ( using
hard contatc , vacuum contact etc) no wafer vacuum errors,
Ok to use. 

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