From latta at snf.stanford.edu  Thu Nov  3 16:45:37 2005
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 3 Nov 2005 16:45:37 -0800
Subject: Problem karlsuss2 SNF 2005-11-03 16:45:36: resolution not good
Message-ID: <mailman.317.1356281959.4015.karlsuss2-pcs@snf.stanford.edu>

My lines and squares look squiggly and not sharp.  Tried several different exposyre times with no improvement.  So I went to karlsuss- same thing, see problem msg on it.



From vilanova at snf.stanford.edu  Fri Nov  4 07:56:07 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 4 Nov 2005 07:56:07 -0800
Subject: Problem karlsuss2 SNF 2005-11-03 16:45:36: resolution not good
Message-ID: <mailman.318.1356281959.4015.karlsuss2-pcs@snf.stanford.edu>

I exposed a wafer using mahnaz resolution mask , resolution perfect , I could not repeat the problem , ok to use. 



From rcordova at snf.stanford.edu  Tue Nov 22 10:59:50 2005
From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu)
Date: Tue, 22 Nov 2005 10:59:50 -0800
Subject: Comment karlsuss2 SNF 2005-11-22 10:59:49: comets seen on 3162
Message-ID: <mailman.319.1356281959.4015.karlsuss2-pcs@snf.stanford.edu>

mentioned to Mike that most wafers have one to two comets across the wafer  



From vilanova at snf.stanford.edu  Tue Nov 22 14:26:12 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 22 Nov 2005 14:26:12 -0800
Subject: Comment karlsuss2 SNF 2005-11-22 10:59:49: comets seen on 3162
Message-ID: <mailman.320.1356281959.4015.karlsuss2-pcs@snf.stanford.edu>

this comment should be for the Coater and not the karlsuss,
I checked the Coater tracks ( 1 and 2 ) dispense and cycled many wafers I could not see any comets on my wafers. 



From seoung at snf.stanford.edu  Thu Nov 24 14:33:01 2005
From: seoung at snf.stanford.edu (seoung at snf.stanford.edu)
Date: Thu, 24 Nov 2005 14:33:01 -0800
Subject: Problem karlsuss2 SNF 2005-11-24 14:32:59: BSA problem
Message-ID: <mailman.321.1356281959.4015.karlsuss2-pcs@snf.stanford.edu>

Backside microscope on the right side does not work.



From vilanova at snf.stanford.edu  Mon Nov 28 07:33:03 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 28 Nov 2005 07:33:03 -0800
Subject: Problem karlsuss2 SNF 2005-11-24 14:32:59: BSA problem
Message-ID: <mailman.322.1356281959.4015.karlsuss2-pcs@snf.stanford.edu>

Replaced bad BSA Light Bulb, tested , ready to use.