From elvislin at snf.stanford.edu  Thu Sep  1 18:23:47 2005
From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu)
Date: Thu, 1 Sep 2005 18:23:47 -0700
Subject: Problem karlsuss2 SNF 2005-09-01 18:23:46: non-uniform exposure across the wafer
Message-ID: <mailman.315.1356281959.4015.karlsuss2-pcs@snf.stanford.edu>

The pattern in the central area is rounded while the side is ok



From martinez at snf.stanford.edu  Fri Sep  2 09:01:24 2005
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Fri, 2 Sep 2005 09:01:24 -0700
Subject: Problem karlsuss2 SNF 2005-09-01 18:23:46: non-uniform exposure across the wafer
Message-ID: <mailman.316.1356281959.4015.karlsuss2-pcs@snf.stanford.edu>

lamp uniformity on CI1 is 1.70%
intensity = 15mw/cm2
both readings are well within KS spec
npf