Problem karlsuss2 SNF 2005-09-01 18:23:46: non-uniform exposure across the wafer

martinez at snf.stanford.edu martinez at snf.stanford.edu
Fri Sep 2 09:01:24 PDT 2005


lamp uniformity on CI1 is 1.70%
intensity = 15mw/cm2
both readings are well within KS spec
npf




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