From johnchoi at snf.stanford.edu Thu Aug 3 13:03:43 2006 From: johnchoi at snf.stanford.edu (johnchoi at snf.stanford.edu) Date: Thu, 3 Aug 2006 13:03:43 -0700 Subject: Problem karlsuss2 SNF 2006-08-03 13:03:42: loss of vacuum error Message-ID: When exposing, says loss of vacuum on mask, but mask is not falling off. From vilanova at snf.stanford.edu Thu Aug 3 14:13:52 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Aug 2006 14:13:52 -0700 Subject: Problem karlsuss2 SNF 2006-08-03 13:03:42: loss of vacuum error Message-ID: COuld not repeat problem , tested and exposed wafer, ok to use. From uyoon at snf.stanford.edu Fri Aug 4 07:10:40 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Fri, 4 Aug 2006 07:10:40 -0700 Subject: Comment karlsuss2 SNF 2006-08-04 07:10:38: reservation removed from 8-10 Message-ID: From vilanova at snf.stanford.edu Fri Aug 4 07:57:05 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 Aug 2006 07:57:05 -0700 Subject: Comment karlsuss2 SNF 2006-08-04 07:10:38: reservation removed from 8-10 Message-ID: cleared comment. From lindaw at snf.stanford.edu Tue Aug 8 15:59:51 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 8 Aug 2006 15:59:51 -0700 Subject: Comment karlsuss2 SNF 2006-08-08 15:59:50: reservation time limits? Message-ID: I was under the impression that there is a 2 hour time limit for reservations during peak weekday hours. Has this policy changed? I have noticed some reservations during peak hours that are longer than 2 hours. Can someone send out a reminder email if the limit is still 2 hours, or a change of policy email if there is no longer a time limit for Karlsuss (1 or 2) reservations. Thanks. From libei at snf.stanford.edu Wed Aug 9 06:54:58 2006 From: libei at snf.stanford.edu (libei at snf.stanford.edu) Date: Wed, 9 Aug 2006 06:54:58 -0700 Subject: Problem karlsuss2 SNF 2006-08-09 06:54:54: exposure problem Message-ID: my wafers became quite blur after exposure and developing. Tried several times, but problem still remained. From vilanova at snf.stanford.edu Wed Aug 9 07:43:00 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 9 Aug 2006 07:43:00 -0700 Subject: Problem karlsuss2 SNF 2006-08-09 06:54:54: exposure problem Message-ID: I exposed a wafer ,no exposure problem found, Operator error. ok to use. From ccreese at snf.stanford.edu Fri Aug 11 08:19:44 2006 From: ccreese at snf.stanford.edu (ccreese at snf.stanford.edu) Date: Fri, 11 Aug 2006 08:19:44 -0700 Subject: Problem karlsuss2 SNF 2006-08-11 08:19:42: Exposure inconsistent Message-ID: Strange exposure patterns: despite feature overexposure, center of larger pattern areas remains unexposed and will not develop even after extended development. This problem occurs primarily in outer half (radially) of wafer. From vilanova at snf.stanford.edu Fri Aug 11 09:52:00 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Aug 2006 09:52:00 -0700 Subject: Comment karlsuss2 SNF 2006-08-08 15:59:50: reservation time limits? Message-ID: cleared comment. From vilanova at snf.stanford.edu Fri Aug 11 09:53:02 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Aug 2006 09:53:02 -0700 Subject: Problem karlsuss2 SNF 2006-08-11 08:19:42: Exposure inconsistent Message-ID: checked uniformity , uniformity looks good, Rossy Exposed wafers with no exposure problems, ok to use. From mislam at snf.stanford.edu Mon Aug 14 15:57:29 2006 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 14 Aug 2006 15:57:29 -0700 Subject: Shutdown karlsuss2 SNF 2006-08-14 15:57:29: WEC makes noise unloading wafer Message-ID: Wafer vacuum error on every wafer. WEC makes a noise while unloading wafer as if it's hiting something From vilanova at snf.stanford.edu Tue Aug 15 08:07:36 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Aug 2006 08:07:36 -0700 Subject: Shutdown karlsuss2 SNF 2006-08-14 15:57:29: WEC makes noise unloading wafer Message-ID: adjusted Z unit ( wec ) exposed wafers, no more wec noise ok to use. From me342b at snf.stanford.edu Thu Aug 17 04:40:16 2006 From: me342b at snf.stanford.edu (me342b at snf.stanford.edu) Date: Thu, 17 Aug 2006 04:40:16 -0700 Subject: Problem karlsuss2 SNF 2006-08-17 04:40:15: Mask holder stuck and keypad frozen Message-ID: Mask holder is stuck and keypad is frozen. Screen says "Ready for Load" but nothing works From me342b at snf.stanford.edu Thu Aug 17 06:43:13 2006 From: me342b at snf.stanford.edu (me342b at snf.stanford.edu) Date: Thu, 17 Aug 2006 06:43:13 -0700 Subject: Shutdown karlsuss2 SNF 2006-08-17 06:43:12: Mask holder stuck and keypads frozen Message-ID: Mask holder is stuck and keypads are frozen. Screen says, "Read for Load," but can't load a wafer and can't change a mask. 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From uyoon at snf.stanford.edu Thu Aug 17 09:48:59 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Thu, 17 Aug 2006 09:48:59 -0700 Subject: Shutdown karlsuss2 SNF 2006-08-17 06:43:12: Mask holder stuck and keypads frozen Message-ID: initialized the machine and exposed wafer. everythung is working okay. no dropping mask. ready to use. From uyoon at snf.stanford.edu Thu Aug 17 09:49:42 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Thu, 17 Aug 2006 09:49:42 -0700 Subject: Problem karlsuss2 SNF 2006-08-17 04:40:15: Mask holder stuck and keypad frozen Message-ID: also key pads are working fine From mahnaz at snf.stanford.edu Thu Aug 17 11:25:20 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 17 Aug 2006 11:25:20 -0700 Subject: Problem karlsuss2 SNF 2006-08-17 11:25:19: I cleaned the LEDs and was able to Message-ID: only run one wafer out of 3 wafers. I have asked Chang to reclean and adjust the sensetivity of the LEDs if he could. I had changed the LEDs about two yeras a go and I am surprised that is misbehaving. If needed we can do it manually using the foil. From mahnaz at snf.stanford.edu Thu Aug 17 11:28:45 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 17 Aug 2006 11:28:45 -0700 Subject: Comment karlsuss2 SNF 2006-08-17 11:28:45: wrong info intended for Nikon Message-ID: From mahnaz at snf.stanford.edu Thu Aug 17 11:47:01 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 17 Aug 2006 11:47:01 -0700 Subject: Comment karlsuss2 SNF 2006-08-17 11:47:00: earlier information meant for Nikon, sorry. Message-ID: From uyoon at snf.stanford.edu Thu Aug 17 11:59:37 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Thu, 17 Aug 2006 11:59:37 -0700 Subject: Comment karlsuss2 SNF 2006-08-17 11:47:00: earlier information meant for Nikon, sorry. Message-ID: From uyoon at snf.stanford.edu Thu Aug 17 11:59:49 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Thu, 17 Aug 2006 11:59:49 -0700 Subject: Comment karlsuss2 SNF 2006-08-17 11:28:45: wrong info intended for Nikon Message-ID: From uyoon at snf.stanford.edu Thu Aug 17 12:00:04 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Thu, 17 Aug 2006 12:00:04 -0700 Subject: Problem karlsuss2 SNF 2006-08-17 11:25:19: I cleaned the LEDs and was able to Message-ID: