Problem karlsuss2 SNF 2006-08-11 08:19:42: Exposure inconsistent

ccreese at snf.stanford.edu ccreese at snf.stanford.edu
Fri Aug 11 08:19:44 PDT 2006


Strange exposure patterns: despite feature overexposure, center of larger pattern areas remains unexposed and will not develop even after extended development. This problem occurs primarily in outer half (radially) of wafer.




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