Shutdown karlsuss2 SNF 2006-08-14 15:57:29: WEC makes noise unloading wafer

mislam at snf.stanford.edu mislam at snf.stanford.edu
Mon Aug 14 15:57:29 PDT 2006


Wafer vacuum error on every wafer.
WEC makes a noise while unloading wafer as if it's hiting something




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