Shutdown karlsuss2 SNF 2006-08-17 06:43:12: Mask holder stuck and keypads frozen

me342b at snf.stanford.edu me342b at snf.stanford.edu
Thu Aug 17 06:43:13 PDT 2006


Mask holder is stuck and keypads are frozen.
Screen says, "Read for Load," but can't load a wafer and can't change a mask.




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