From mahnaz at snf.stanford.edu Wed Jan 4 13:40:07 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 4 Jan 2006 13:40:07 -0800 Subject: Problem karlsuss2 SNF 2006-01-04 13:40:06: needs slight adjustment in the center Message-ID: I was not able to resolve 3.5 um and less in hard contact mode in the center. From martinez at snf.stanford.edu Wed Jan 4 16:48:32 2006 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 4 Jan 2006 16:48:32 -0800 Subject: Problem karlsuss2 SNF 2006-01-04 13:40:06: needs slight adjustment in the center Message-ID: calibrated lamp, adj uniformity, cleaaned chuck, mask mask holder. resolved 1.5um across test wafer From crichter at snf.stanford.edu Wed Jan 4 18:17:16 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Wed, 4 Jan 2006 18:17:16 -0800 Subject: Problem karlsuss2 SNF 2006-01-04 18:17:15: 20X objective blurry Message-ID: I'm doing a topside alignment in vacuum contact mode. As I align the cross hairs from layer 1 to the mask alignment features, I can't get the 20X objective to look sharp enough to line it up with the features on the wafer. It lookblurry and cannot get the wafer features in focus with the mask features. From crichter at snf.stanford.edu Wed Jan 4 18:20:54 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Wed, 4 Jan 2006 18:20:54 -0800 Subject: Comment karlsuss2 SNF 2006-01-04 18:20:53: more on fuzzy 20X objectives Message-ID: I forgot to mention that I see the fuzziness on both objectives. From vilanova at snf.stanford.edu Thu Jan 5 08:55:05 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jan 2006 08:55:05 -0800 Subject: Problem karlsuss2 SNF 2006-01-04 18:17:15: 20X objective blurry Message-ID: I just adjusted the Top side Micorscope Aperture , ok to use. From vilanova at snf.stanford.edu Thu Jan 5 08:55:33 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jan 2006 08:55:33 -0800 Subject: Comment karlsuss2 SNF 2006-01-04 18:20:53: more on fuzzy 20X objectives Message-ID: Adjusted Top Side Microscope Aperture. ready to use. From crichter at snf.stanford.edu Thu Jan 5 16:42:54 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 5 Jan 2006 16:42:54 -0800 Subject: Problem karlsuss2 SNF 2006-01-05 16:42:53: 20x objectives hazy Message-ID: I can't get both the alignment marks to be in focus with the alignment marks on the photomask in contact mode. If I focus on the mask alignment marks, the markers on the wafer goes out of focus...and vice versa. 10x looks a little hazy, 5x is good. From vilanova at snf.stanford.edu Fri Jan 6 13:52:46 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 6 Jan 2006 13:52:46 -0800 Subject: Problem karlsuss2 SNF 2006-01-05 16:42:53: 20x objectives hazy Message-ID: checked system 10 X and 5 X are Fine 20x is within spec ,but we'll keep an eye on it, ok to use. From hycho at snf.stanford.edu Tue Jan 24 09:23:06 2006 From: hycho at snf.stanford.edu (hycho at snf.stanford.edu) Date: Tue, 24 Jan 2006 09:23:06 -0800 Subject: Problem karlsuss2 SNF 2006-01-24 09:23:05: LAMP Power Message-ID: Lamp power is lowering to 12.7mW, and it seems to induce under-expose problem for my samples. I increased the exposure time, and it worked. However, we should change the lamp or tuning the power. From martinez at snf.stanford.edu Tue Jan 24 09:46:33 2006 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 24 Jan 2006 09:46:33 -0800 Subject: Shutdown karlsuss2 SNF 2006-01-24 09:46:32: lamp change Message-ID: From martinez at snf.stanford.edu Tue Jan 24 11:03:17 2006 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 24 Jan 2006 11:03:17 -0800 Subject: Shutdown karlsuss2 SNF 2006-01-24 09:46:32: lamp change Message-ID: replaced and calibrated lamp From martinez at snf.stanford.edu Tue Jan 24 11:03:27 2006 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 24 Jan 2006 11:03:27 -0800 Subject: Problem karlsuss2 SNF 2006-01-24 09:23:05: LAMP Power Message-ID: new lamp From uyoon at snf.stanford.edu Tue Jan 31 09:23:52 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Tue, 31 Jan 2006 09:23:52 -0800 Subject: Shutdown karlsuss2 SNF 2006-01-31 09:23:52: down for repair Message-ID: objective unit is out of normal position. From vilanova at snf.stanford.edu Tue Jan 31 10:32:55 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 31 Jan 2006 10:32:55 -0800 Subject: Shutdown karlsuss2 SNF 2006-01-31 09:23:52: down for repair Message-ID: Adjusted microscope, ready to use.