Problem karlsuss2 SNF 2006-01-05 16:42:53: 20x objectives hazy

crichter at snf.stanford.edu crichter at snf.stanford.edu
Thu Jan 5 16:42:54 PST 2006


I can't get both the alignment marks to be in focus with the alignment marks on the photomask in contact mode. If I focus on the mask alignment marks, the markers on the wafer goes out of focus...and vice versa. 10x looks a little hazy, 5x is good.




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