From yoonjin at snf.stanford.edu  Tue Jun  6 00:57:33 2006
From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu)
Date: Tue, 6 Jun 2006 00:57:33 -0700
Subject: Comment karlsuss2 SNF 2006-06-06 00:57:32: Did not use
Message-ID: <mailman.351.1356281960.4015.karlsuss2-pcs@snf.stanford.edu>

I enabled Karlsuss2, but was having some problems at the svg coat, and did not end up using the Karlsuss2. Please do not charge my account. I really appreciate it!



From vilanova at snf.stanford.edu  Tue Jun  6 09:23:18 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 6 Jun 2006 09:23:18 -0700
Subject: Shutdown karlsuss2 SNF 2006-06-06 09:23:12: monthly pm in progress.....
Message-ID: <mailman.352.1356281960.4015.karlsuss2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Jun  6 10:34:24 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 6 Jun 2006 10:34:24 -0700
Subject: Shutdown karlsuss2 SNF 2006-06-06 09:23:12: monthly pm in progress.....
Message-ID: <mailman.353.1356281960.4015.karlsuss2-pcs@snf.stanford.edu>

Lamp change completed , lamp calibrated 
Ci1 = 0.3 uniformity
Ci2 = 0.5 Uniformity
Ready to use. 



From lindaw at snf.stanford.edu  Thu Jun 15 11:12:27 2006
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Thu, 15 Jun 2006 11:12:27 -0700
Subject: Problem karlsuss2 SNF 2006-06-15 11:12:11: left backside objective has no illumination.
Message-ID: <mailman.354.1356281960.4015.karlsuss2-pcs@snf.stanford.edu>

bulb burned out?



From vilanova at snf.stanford.edu  Fri Jun 16 08:41:32 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 16 Jun 2006 08:41:32 -0700
Subject: Comment karlsuss2 SNF 2006-06-06 00:57:32: Did not use
Message-ID: <mailman.355.1356281960.4015.karlsuss2-pcs@snf.stanford.edu>

Cleared Comment. 



From vilanova at snf.stanford.edu  Fri Jun 16 08:41:56 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 16 Jun 2006 08:41:56 -0700
Subject: Problem karlsuss2 SNF 2006-06-15 11:12:11: left backside objective has no illumination.
Message-ID: <mailman.356.1356281960.4015.karlsuss2-pcs@snf.stanford.edu>

Replaced burned Ligh bulb. 



From vilanova at snf.stanford.edu  Thu Jun 29 07:20:17 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 29 Jun 2006 07:20:17 -0700
Subject: Shutdown karlsuss2 SNF 2006-06-29 07:20:16: Maintenance In progress..... 
Message-ID: <mailman.357.1356281960.4015.karlsuss2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Thu Jun 29 07:55:28 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 29 Jun 2006 07:55:28 -0700
Subject: Shutdown karlsuss2 SNF 2006-06-29 07:20:16: Maintenance In progress..... 
Message-ID: <mailman.358.1356281960.4015.karlsuss2-pcs@snf.stanford.edu>

Cleaned Elippsoidal & COld Mirrors, Replaced Lamp &
calibrated cleaned chuck ,wec and  mask holder ,
Calibrated all different 5 point for uniformity ( Less than 2.0%)
System Ready to use. 



From jimkruger at snf.stanford.edu  Fri Jun 30 15:27:39 2006
From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu)
Date: Fri, 30 Jun 2006 15:27:39 -0700
Subject: Problem karlsuss2 SNF 2006-06-30 15:27:39: Resist sticks to mask
Message-ID: <mailman.359.1356281960.4015.karlsuss2-pcs@snf.stanford.edu>

In vacuum contact, wafer stuck to mask.  Pryed it  loose. Resist left on mask over most of the wafer area.
It was OK on 1st wafer in hard contact, not vacuum contact.