Problem karlsuss2 SNF 2006-06-30 15:27:39: Resist sticks to mask

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Fri Jun 30 15:27:39 PDT 2006


In vacuum contact, wafer stuck to mask.  Pryed it  loose. Resist left on mask over most of the wafer area.
It was OK on 1st wafer in hard contact, not vacuum contact.




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