Shutdown karlsuss2 SNF 2006-11-16 17:24:10: Loss of Mask Vac

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Nov 17 08:10:15 PST 2006

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Initialized system , adjusted vacuum mask holder, checked
and inspected vacuum mask holder chuck , exposed a 
couple of wafers , ok to use.

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