Problem karlsuss2 SNF 2007-08-25 12:23:25: loss of vacuum during WEC

tura at snf.stanford.edu tura at snf.stanford.edu
Sat Aug 25 12:23:25 PDT 2007


The wafer loses vacuum and it gives an error during WEC. Karlsuss1 doesn't have this problem so it's related to the machine.




More information about the karlsuss2-pcs mailing list