Problem karlsuss2 SNF 2007-06-20 01:23:55: 1.6um wafer stuck to the mask when using vacuum mode after exposure

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Jun 20 08:00:21 PDT 2007


ran same exposure could not repeat problem, maybe the 
gap between the wafers and the mask was to close, ok to use. 




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