From iwjung at snf.stanford.edu Sun Apr 6 20:53:34 2008 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Sun, 6 Apr 2008 20:53:34 -0700 Subject: Problem karlsuss2 SNF 2008-04-06 20:53:33: stage x-movement limited Message-ID: the stage is centered in x-direction when micrometer is set near zero marker. From vilanova at snf.stanford.edu Mon Apr 7 09:07:20 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 7 Apr 2008 09:07:20 -0700 Subject: Shutdown karlsuss2 SNF 2008-04-07 09:07:18: broken X micrometer Message-ID: From gsosa at snf.stanford.edu Mon Apr 7 14:08:48 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 7 Apr 2008 14:08:48 -0700 Subject: Shutdown karlsuss2 SNF 2008-04-07 09:07:18: broken X micrometer Message-ID: Removed the X micrometer and re-installed the ball bearing tip. Re-installed and checked X travel- All OK. Checked and cleaned critical surfaces and reset system. Tested with dummy wafers- all OK. GS/MV From gsosa at snf.stanford.edu Mon Apr 7 14:09:13 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 7 Apr 2008 14:09:13 -0700 Subject: Problem karlsuss2 SNF 2008-04-06 20:53:33: stage x-movement limited Message-ID: Removed the X micrometer and re-installed the ball bearing tip. Re-installed and checked X travel- All OK. Checked and cleaned critical surfaces and reset system. Tested with dummy wafers- all OK. GS/MV From erichall at snf.stanford.edu Fri Apr 11 09:04:34 2008 From: erichall at snf.stanford.edu (erichall at snf.stanford.edu) Date: Fri, 11 Apr 2008 09:04:34 -0700 Subject: Comment karlsuss2 SNF 2008-04-11 09:04:33: Keypad Damaged Message-ID: I noticed that the keypad has been damaged at the exposure button. It still functions fine, just thought it should be noted. From mrlin at snf.stanford.edu Mon Apr 21 13:36:23 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Mon, 21 Apr 2008 13:36:23 -0700 Subject: Comment karlsuss2 SNF 2008-04-21 13:36:17: KS2 Quals, Week of 4/13 Message-ID: 1um 3612: resolved 1um 1.6um 3612: resolved most 1um; 1.5um definitely 3.0um SPR-200-3: resolved 2um From gsosa at snf.stanford.edu Wed Apr 23 08:43:39 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 23 Apr 2008 08:43:39 -0700 Subject: Comment karlsuss2 SNF 2008-04-23 08:43:38: UV lamp changed Message-ID: Completed scheduled lamp change. Intensity set to 15mw/cm2 and uniformity is 2.2% From mrlin at snf.stanford.edu Fri Apr 25 16:33:17 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Fri, 25 Apr 2008 16:33:17 -0700 Subject: Comment karlsuss2 SNF 2008-04-25 16:33:16: KS2 Litho Quals, Week of 4/20 Message-ID: 1um 3612 1.0s: at best 1um resolved 1.6um 3612 1.6s: at best 1um resolved [most 1.5um] 3.0 um SPR-220-3 3.0s: at best 1.5um resolved [most 2um]