Shutdown karlsuss2 SNF 2008-04-07 09:07:18: broken X micrometer

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Apr 7 14:08:48 PDT 2008


Removed the X micrometer and re-installed the ball bearing tip. Re-installed and checked X travel- All OK. Checked and cleaned critical surfaces and reset system. Tested with dummy wafers- all OK. GS/MV




More information about the karlsuss2-pcs mailing list