Problem karlsuss2 SNF 2008-04-06 20:53:33: stage x-movement limited

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Apr 7 14:09:13 PDT 2008


Removed the X micrometer and re-installed the ball bearing tip. Re-installed and checked X travel- All OK. Checked and cleaned critical surfaces and reset system. Tested with dummy wafers- all OK. GS/MV




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