From rcordova at snf.stanford.edu  Fri Aug  1 14:51:34 2008
From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu)
Date: Fri, 1 Aug 2008 14:51:34 -0700
Subject: Comment karlsuss2 SNF 2008-08-01 14:51:33: Y-Micrometer is loose
Message-ID: <mailman.566.1356281962.4015.karlsuss2-pcs@snf.stanford.edu>

Mario checking out the Y-micrometer, it is hanging out by h1/4 of inch.



From vilanova at snf.stanford.edu  Fri Aug  1 15:02:35 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 1 Aug 2008 15:02:35 -0700
Subject: Comment karlsuss2 SNF 2008-08-01 14:51:33: Y-Micrometer is loose
Message-ID: <mailman.567.1356281962.4015.karlsuss2-pcs@snf.stanford.edu>

adjusted micrometer, ok to use. 



From vilanova at snf.stanford.edu  Wed Aug  6 07:40:18 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 6 Aug 2008 07:40:18 -0700
Subject: Shutdown karlsuss2 SNF 2008-08-06 07:40:17: monthly lamp change in progress..... 
Message-ID: <mailman.568.1356281962.4015.karlsuss2-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Wed Aug  6 08:33:35 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 6 Aug 2008 08:33:35 -0700
Subject: Shutdown karlsuss2 SNF 2008-08-06 07:40:17: monthly lamp change in progress..... 
Message-ID: <mailman.569.1356281962.4015.karlsuss2-pcs@snf.stanford.edu>

monthly lamp change completed
intensity = 15Mw/cm2
Uniformity = 1%



From gsosa at snf.stanford.edu  Mon Aug 18 15:42:11 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 18 Aug 2008 15:42:11 -0700
Subject: Comment karlsuss2 SNF 2008-08-18 15:42:10: Power failure recovery
Message-ID: <mailman.570.1356281962.4015.karlsuss2-pcs@snf.stanford.edu>

Re-started the UV lamp and stabilized. Powered up the tool. Checked lamp intensity- OK at 15 mw/cm2



From mahnaz at snf.stanford.edu  Thu Aug 21 12:19:52 2008
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 21 Aug 2008 12:19:52 -0700
Subject: Shutdown karlsuss2 SNF 2008-08-21 12:19:51: no exposure
Message-ID: <mailman.571.1356281962.4015.karlsuss2-pcs@snf.stanford.edu>

Not sure what is wrong we exposed two wafers did not get any 
exposure. the intensity reading is not reading anything but the light did come on.



From vilanova at snf.stanford.edu  Thu Aug 21 14:12:21 2008
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 21 Aug 2008 14:12:21 -0700
Subject: Shutdown karlsuss2 SNF 2008-08-21 12:19:51: no exposure
Message-ID: <mailman.572.1356281962.4015.karlsuss2-pcs@snf.stanford.edu>

Adjusted lamp calibration, and display power supply settings, tested , Good to use.