Problem karlsuss2 SNF 2008-01-07 10:30:38: Lamp power supply, blows fuses

gsosa at gsosa at
Fri Jan 18 13:34:16 PST 2008

The repaired power supply was recieved today after being repaired by Karl Suss. Installed the power supply and started lamp. Warmed lamp up and calibrated lamp intensity for 15.0Mw/cm2. Checked uniformity at 15.0mj/cm2- looks good at 1.6 %. Cycle tested system with dummy mask and wafers. All OK. Will shoot verification wafer on Tuesday. If you use the system, please shoot a test wafer to verify your process. Please make comments in coral if there are any issues.

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