Comment karlsuss2 SNF 2008-01-22 13:30:07: Exposure on 3612 (1 micron resist)

rcordova at snf.stanford.edu rcordova at snf.stanford.edu
Tue Jan 22 13:30:07 PST 2008


I did a quick check on exposure for 1 micron resist:
Best exposure, from .8 to 1.2:
1.1 sec in hard contact clears out 4 micron lines/space.   These are  the geometries that I require.




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