Comment karlsuss2 SNF 2008-01-24 10:05:21: Exposure ok

[jparker at snf.stanford.edu]

-Exposure ok post-lamp-change:
-1um 3612 (vac 1.0s) has 1.5um lines&spaces clear everywhere. Noticable line edge roughness on most 1um lines.
-1.6um 3612 (vac 1.6s) has 1.5um lines&spaces clear on most of the wafer. 2um L&S clear everywhere.