Comment karlsuss2 SNF 2008-01-24 10:29:23: Addition: above jparker message

jparker at snf.stanford.edu jparker at snf.stanford.edu
Thu Jan 24 10:29:23 PST 2008


Similar to karlsuss1:
Had Mahnaz look at wafers, she noticed dark field Lines&Spaces had much more issues with clearing (all above comments about L&S in light field (with no resist  nearby)). M.M. doesn't see consistent resolution at 2um or less.




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