From vilanova at snf.stanford.edu Thu Jun 5 09:39:14 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jun 2008 09:39:14 -0700 Subject: Shutdown karlsuss2 SNF 2008-06-05 09:39:13: monthly lamp change in progress...... Message-ID: From vilanova at snf.stanford.edu Thu Jun 5 10:28:35 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jun 2008 10:28:35 -0700 Subject: Shutdown karlsuss2 SNF 2008-06-05 09:39:13: monthly lamp change in progress...... Message-ID: Monthly Pm and lamp calibration completed. Intensity = 15Mw/Cm2 Uniformity = 1.3% From rcordova at snf.stanford.edu Tue Jun 10 15:06:01 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 10 Jun 2008 15:06:01 -0700 Subject: Problem karlsuss2 SNF 2008-06-10 15:06:01: resist dribbling after dispense Message-ID: While wafer is spinning, I am getting dribbles (poor suckback) on wafers. Mario watched with me. Needs to be addressed. RC From rcordova at snf.stanford.edu Tue Jun 10 15:06:45 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 10 Jun 2008 15:06:45 -0700 Subject: Comment karlsuss2 SNF 2008-06-10 15:06:45: Ooopss....wrong system! Message-ID: Meant for SVG2!! From vilanova at snf.stanford.edu Tue Jun 10 15:12:17 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 10 Jun 2008 15:12:17 -0700 Subject: Problem karlsuss2 SNF 2008-06-10 15:06:01: resist dribbling after dispense Message-ID: cleared ,wrong one. From vilanova at snf.stanford.edu Tue Jun 10 15:12:26 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 10 Jun 2008 15:12:26 -0700 Subject: Comment karlsuss2 SNF 2008-06-10 15:06:45: Ooopss....wrong system! Message-ID: cleared. From rcordova at snf.stanford.edu Tue Jun 17 08:59:56 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Tue, 17 Jun 2008 08:59:56 -0700 Subject: Problem karlsuss2 SNF 2008-06-17 08:59:55: Please check on vibration issue Message-ID: After speaking with Mario, then Mahnaz, she requested that I report this problem. After alignment in Hard contact mode, with verniers centered perfectly, exposed wafers are coming out with over half a micron misalignment. Mario seems to believe it is from the pump for the E-beam tool that sits in the chaseway. Mahnaz would like it to be investigated further. Thanks!! From tdo at snf.stanford.edu Thu Jun 19 23:31:49 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Thu, 19 Jun 2008 23:31:49 -0700 Subject: Shutdown karlsuss2 SNF 2008-06-19 23:31:48: machine somehow restarted Message-ID: when i came back from developing the machine appeared to be in some sort of startup mode. it reported messages like "watch out! machine is starting" and is presently asking a question about machine configuration (of which i do not know the answer to) From vilanova at snf.stanford.edu Fri Jun 20 07:33:27 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 20 Jun 2008 07:33:27 -0700 Subject: Shutdown karlsuss2 SNF 2008-06-19 23:31:48: machine somehow restarted Message-ID: initialized machine, tested it , system back to normal. From tdo at snf.stanford.edu Tue Jun 24 17:49:17 2008 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 24 Jun 2008 17:49:17 -0700 Subject: Problem karlsuss2 SNF 2008-06-24 17:49:16: low lamp power Message-ID: lamp power reports 13.9mW during exposure From vilanova at snf.stanford.edu Wed Jun 25 07:53:25 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 Jun 2008 07:53:25 -0700 Subject: Problem karlsuss2 SNF 2008-06-24 17:49:16: low lamp power Message-ID: monthly lamp completed Intensity = 15mw/cm2 uniformity = 2.3%