Problem karlsuss2 SNF 2008-06-17 08:59:55: Please check on vibration issue

rcordova at snf.stanford.edu rcordova at snf.stanford.edu
Tue Jun 17 08:59:56 PDT 2008


After speaking with Mario, then Mahnaz, she requested that I report this problem.  
After alignment in Hard contact mode, with verniers centered 
perfectly, exposed wafers are coming out with over half a micron misalignment.  Mario seems to believe it is from the pump for the E-beam tool that sits in the chaseway.  Mahnaz would like
it to be investigated further.  
Thanks!!




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