Problem karlsuss2 SNF 2008-03-04 00:21:39: loss of wafer vac

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Mar 4 08:00:23 PST 2008


checked mask vacuum and wafer vacuum Both are working 
Fine, I exposed a couple of wafers and I couldnt repeat
the problem, ok to use. 




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