Shutdown karlsuss2 SNF 2008-05-07 12:01:23: Stage not moving

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed May 7 12:01:23 PDT 2008


I had a call from user that there is an error on the system and 
he is not able to do anything. I have enabled over him and I am shutting the system down.
His mask and wafer are stuck in the system.




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