Problem karlsuss2 SNF 2008-10-17 17:25:20: No Contact

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Fri Oct 17 17:25:21 PDT 2008


I set the machine for soft contact, when I pushed the align button,  the contact light came on, but the wafer did not go into contact with the mask.  




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