From gsosa at snf.stanford.edu Mon Aug 3 09:06:02 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 3 Aug 2009 09:06:02 -0700 Subject: Comment karlsuss2 SNF 2009-08-03 09:06:01: Monthly lamp change Message-ID: Completed monthly lamp change. Calibrated lamp to 15.- mw/cm2. Uniformity at 2.3% From dgunning at snf.stanford.edu Mon Aug 24 22:30:02 2009 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Mon, 24 Aug 2009 22:30:02 -0700 Subject: Problem karlsuss2 SNF 2009-08-24 22:30:01: buttons not working Message-ID: no little green lights on buttons and nothing happens when i press them From yiwu at snf.stanford.edu Mon Aug 24 23:15:14 2009 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Mon, 24 Aug 2009 23:15:14 -0700 Subject: Comment karlsuss2 SNF 2009-08-24 23:15:14: roobt system works fine Message-ID: I reboot the system and set the machine to MA6 mode, aligned the substrate, ran two dummy wafers...looks fine. From vilanova at snf.stanford.edu Tue Aug 25 06:58:04 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Aug 2009 06:58:04 -0700 Subject: Problem karlsuss2 SNF 2009-08-24 22:30:01: buttons not working Message-ID: One of the USers (Yiwu) Re initialized the machine, system ok , good to use. From vilanova at snf.stanford.edu Tue Aug 25 06:58:19 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Aug 2009 06:58:19 -0700 Subject: Comment karlsuss2 SNF 2009-08-24 23:15:14: roobt system works fine Message-ID: One of the USers (Yiwu) Re initialized the machine, system ok , good to use. From vilanova at snf.stanford.edu Tue Aug 25 06:58:37 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Aug 2009 06:58:37 -0700 Subject: Comment karlsuss2 SNF 2009-07-17 14:49:16: I finished with the Karlsuss2 at 12:10pm Fri. Message-ID: cleared