From ghiggs at snf.stanford.edu Tue Dec 8 11:00:52 2009 From: ghiggs at snf.stanford.edu (ghiggs at snf.stanford.edu) Date: Tue, 8 Dec 2009 11:00:52 -0800 Subject: Problem karlsuss2 SNF 2009-12-08 11:00:51: Backside Alignment Message-ID: BSA focus drift -The image periodically drifted out of focus then came back into focus. This happened continuously Highly sensitive focus knobs -knobs were highly sensitive and had overshoot when released From mahnaz at snf.stanford.edu Fri Dec 18 15:29:00 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 18 Dec 2009 15:29:00 -0800 Subject: Comment karlsuss2 SNF 2009-12-18 15:28:59: pm Message-ID: The annual pm was performed on the tool. Tested the system in both top side and bottom side , looks good. 1 um 3612 ran with 1.3 seconds of exposure( lamp 5 weeks old, intensity was at 13.8 mw/cm2).Normally we need less exposure. I got the best result in low vacuum. 1 um /1.5 um resolved in 5 points.