Comment karlsuss2 SNF 2009-12-18 15:28:59: pm

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Dec 18 15:29:00 PST 2009


The annual pm was performed on the tool.
Tested the system in both top side and bottom side , looks good.
1 um 3612 ran with 1.3 seconds of exposure( lamp 5 weeks old, intensity was at 13.8 mw/cm2).Normally we need less exposure.
I got the best result in low vacuum. 1 um /1.5 um resolved in 5 points.




More information about the karlsuss2-pcs mailing list