From gsosa at snf.stanford.edu Mon Jan 5 15:57:52 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 5 Jan 2009 15:57:52 -0800 Subject: Shutdown karlsuss2 SNF 2009-01-05 15:57:51: Lamp Power Spupply Message-ID: The lamp power supply has a problem and needs to be repaired. From mahnaz at snf.stanford.edu Mon Jan 5 22:07:08 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 5 Jan 2009 22:07:08 -0800 Subject: Comment karlsuss2 SNF 2009-01-05 22:07:08: update Message-ID: The system got the pm on 12/18 and 1/19 of 2008 I tested the system on 12/19. I ran two wafers simultaneously for each thickness and ran it with both developers. 1 um of 3612: 1.1 second of exposer in VAC. contact regular developer Ldd26W vs. MF26A I resolved 1um ( some area) and 1.5 um line and space in all areas, with both developers. For 1 um depending on your polarity of your mask and etc. you need 1.1 to 1.3 seconds of exposer. Please note that the original recipe already has been replaced with new developer and the recipe on both svgdev and svgdev2 has been modified for 1 um resist. Same was done with 1.6 um 3612 , 1.6 seconds of expose in Vac. contact and 1.5 um line and space was resolved in all areas with both developers. Please note that the original recipe already has been replaced with new developer and the recipe on both svgdev and svgdev2 has been modified for 1.6 um resist. depending on your polarity of your mask for 1.6 um resist you need 1.5 to 1.8 seconds of exposer. From gsosa at snf.stanford.edu Thu Jan 8 14:42:06 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 8 Jan 2009 14:42:06 -0800 Subject: Shutdown karlsuss2 SNF 2009-01-05 15:57:51: Lamp Power Spupply Message-ID: Troubleshot lamp power supply and replaced bad transistor. Powered up lamp power supply and started the lamp.All OK. Powered up and initialized the system. Warmed up lamp and adjusted lamp position for max intensity and best uniformity. Calibrated power supply for exposure intensity of 15.0 mw/cm2. Uniformity = 1.9%. Cycled wafer through tool. All OK. From shott at snf.stanford.edu Tue Jan 20 07:36:34 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:36:34 -0800 Subject: Comment karlsuss2 SNF 2008-01-14 09:24:32: Karl Suss #2 Status Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:36:39 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:36:39 -0800 Subject: Comment karlsuss2 SNF 2008-01-24 10:05:21: Exposure ok Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:36:43 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:36:43 -0800 Subject: Comment karlsuss2 SNF 2008-01-24 10:07:31: Edit: above message Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:36:48 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:36:48 -0800 Subject: Comment karlsuss2 SNF 2008-01-24 10:29:23: Addition: above jparker message Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:36:54 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:36:54 -0800 Subject: Comment karlsuss2 SNF 2008-02-12 14:17:27: Adjusted left MIcrometer Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:36:59 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:36:59 -0800 Subject: Comment karlsuss2 SNF 2008-02-20 10:50:18: replaced backkside ilumination lamp Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:37:03 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:37:03 -0800 Subject: Comment karlsuss2 SNF 2008-03-14 08:36:19: Replaced UV lamp Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:37:08 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:37:08 -0800 Subject: Comment karlsuss2 SNF 2008-04-11 09:04:33: Keypad Damaged Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:37:13 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:37:13 -0800 Subject: Comment karlsuss2 SNF 2008-04-21 13:36:17: KS2 Quals, Week of 4/13 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:37:18 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:37:18 -0800 Subject: Comment karlsuss2 SNF 2008-04-23 08:43:38: UV lamp changed Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:37:22 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:37:22 -0800 Subject: Comment karlsuss2 SNF 2008-04-25 16:33:16: KS2 Litho Quals, Week of 4/20 Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:37:27 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:37:27 -0800 Subject: Comment karlsuss2 SNF 2008-07-02 08:40:13: Intensity check Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:37:31 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:37:31 -0800 Subject: Comment karlsuss2 SNF 2008-07-15 16:28:36: Ran 1 um resist Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:37:36 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:37:36 -0800 Subject: Comment karlsuss2 SNF 2008-07-31 09:26:28: backside alignment sometimes poor Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:37:42 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:37:42 -0800 Subject: Comment karlsuss2 SNF 2008-08-18 15:42:10: Power failure recovery Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:37:48 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:37:48 -0800 Subject: Comment karlsuss2 SNF 2008-12-14 16:55:24: scotch tape all over edge of KS2 table Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:37:59 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:37:59 -0800 Subject: Comment karlsuss2 SNF 2009-01-05 22:07:08: update Message-ID: To the archives ...