Shutdown karlsuss2 SNF 2009-01-05 15:57:51: Lamp Power Spupply

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Jan 8 14:42:06 PST 2009


Troubleshot lamp power supply and replaced bad transistor. Powered up lamp power supply and started the lamp.All OK. Powered up and initialized the system. Warmed up lamp and adjusted lamp position for max intensity and best uniformity. Calibrated power supply for exposure intensity of 15.0 mw/cm2. Uniformity = 1.9%. Cycled wafer through tool. All OK.




More information about the karlsuss2-pcs mailing list