Problem karlsuss2 SNF 2009-03-13 18:31:06: loss of mask vacuum

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Fri Mar 13 18:31:06 PDT 2009


to avoid same problem as ks #1, I used hard contact mode instead of lo-vac. however still heard the click/pop (louder than the usual wec sound) after exposure, and machine reports 'loss of mask vacuum'. mask is still attached to holder this time. unloaded wafer and mask, but machine still hisses from the wec area. vaccum seal gauge reading becomes lower than normal. wafer has 7um resist, which may be more sticky due to >10um at nonuniform areas.




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