Comment karlsuss2 SNF 2009-03-14 11:32:09: no problem with exposure

Peter Chen jwpchen at stanford.edu
Sat Mar 14 15:05:36 PDT 2009


I see at least two users in the usage history after I used it, so at 
least the 190sec wasn't me...
-Peter

ehe at snf.stanford.edu wrote:
> per previous problem report, hissing stops when you load your wafer; time was set on 190s (maybe you baked your resist into your mask, which might explain sticking) loud pop was probably the vacuum chuck trying to pull your chip back down after it stuck to your mask
> 




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