Problem karlsuss2 SNF 2009-05-09 12:17:44: overcurrent error

quickwin at snf.stanford.edu quickwin at snf.stanford.edu
Sat May 9 12:17:45 PDT 2009


When I was almost done with my job, suddenly my mask dropped onto my wafer and I got error message "overcurrent error".  Luckily nothing is damaged and I was able to resume to finish my job.  I used 1.0um resist and 1.5sec exposure, hard contact, and I got 1um lines resolved fine.  




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