Problem karlsuss2 SNF 2009-05-11 16:56:06: overcurrent error during wafer load

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon May 11 16:56:07 PDT 2009


during wafer load, pushed wafer in and pressed enter, great whooshing sound as if there was a vacuum leak, then overcurrent error and the mask holder dropped my mask onto my wafer.  Machine then prompts to press load to restart. then prompts to remove mask holder to avoid damage to the TSA. Then it is back in what appears to be normal "ready for load" display.




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