From tdo at snf.stanford.edu Thu Oct 8 11:43:40 2009 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Thu, 8 Oct 2009 11:43:40 -0700 Subject: Problem karlsuss2 SNF 2009-10-08 11:43:40: Software limits XY wafer travel Message-ID: Software alarms whenever X goes past 5 or 11mm (as marked on micrometer); or Y passes 7 or 12mm. It should (and usually does) go much further out before alarming. From gsosa at snf.stanford.edu Thu Oct 8 14:38:15 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 8 Oct 2009 14:38:15 -0700 Subject: Problem karlsuss2 SNF 2009-10-08 11:43:40: Software limits XY wafer travel Message-ID: There are X/Y alarm limits for WEC/wafer movement in relation to BSA microscopes. If the BSA microscopes are at their extreme outer limits, there will be software alarms imposed on the WEC to prevent the WEC head from crashing into the BSA microscope probes. To resolve the issue, the user must activate the BSA microscopes and move them independantly with thte left and right buttons to the center position. This will restore full range of motion to the WEC head for wafer positioning. Showed user how to do this. System is up and running. From gsosa at snf.stanford.edu Mon Oct 12 10:08:00 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 12 Oct 2009 10:08:00 -0700 Subject: Comment karlsuss2 SNF 2009-10-12 10:07:59: Scheduled lamp change 10/12 Message-ID: Replaced UV lamp and adjusted lamp position. Calibrated power supply for 15.0 mw/cm2. Uniformity at 2.2%