Problem karlsuss2 SNF 2009-10-08 11:43:40: Software limits XY wafer travel

tdo at snf.stanford.edu tdo at snf.stanford.edu
Thu Oct 8 11:43:40 PDT 2009


Software alarms whenever X goes past 5 or 11mm (as marked on micrometer); or Y passes 7 or 12mm.  It should (and usually does) go much further out before alarming.




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